Large Stage IC Inspection Microscope
RMM-101
Reflected and transmitted light illuminator for inspection of large wafer and photomarks in the IC industry. The microscope is equipped with a large size mechanical stage, smooth movement of ball bearing guides having low coaxial controls for x-y movement.
| Objectives | M4x, M10x, M20x and M50x |
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| Eyepieces | WF10x and WF 15x |
| Magnification | 40x to 750x |
| Model | RMM-101 |
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